Cr2O3 passivated gas tubing system for specialty gases

IEICE Transactions on Electronics

Volumn E79-C, Issue 3, 1996, Pages 385-391

  Shirai, Yasuyuki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Cr2u3, ferritic stainless steel, dry down performance, catalytic behavior, corrosion resistance

Indexed keywords

CHROMIUM COMPOUNDS; CORROSION RESISTANCE; DIFFUSION; ELECTROLYTIC POLISHING; GASES; PASSIVATION; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; SURFACE TREATMENT; WELDING; X RAY PHOTOELECTRON SPECTROSCOPY;

AUSTENITIC STAINLESS STEEL; CATALYTIC BEHAVIOUR; CHROMIUM OXIDE; DRY DOWN PERFORMANCE; FERRITIC STAINLESS STEEL; GAS TUBING SYSTEM; SPECIALTY GASES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030110206     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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