Laser scattering tomography on magnetic Cz-Si for semiconductor process optimization

Solid State Phenomena

Volumn 108-109, Issue , 2005, Pages 597-602

  Steinegger, Th ^a   Naumann, M ^b   Kirscht, F ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b LEIBNIZ INSTITUTE FOR CRYSTAL GROWTH   (Germany)

Author keywords

Band to band photoluminescence; Defect engineering; Laser scattering tomography; Oxygen precipitate; Semiconductor process optimization

Indexed keywords

DEFECTS; MEMS; OPTIMIZATION; PHOTOLUMINESCENCE; PROCESS CONTROL; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR LASERS; TOMOGRAPHY;

BAND-TO-BAND PHOTOLUMINESCENCE; DEFECT ENGINEERING; LASER SCATTERING TOMOGRAPHIES; OXYGEN PRECIPITATES; SEMICONDUCTOR PROCESS;

SILICON WAFERS;

EID: 36048994625     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.108-109.597     Document Type: Conference Paper

References (7)

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