Simultaneous observation of the behavior of impurities and silicon atoms in silicon isotope superlattices

Physica B: Condensed Matter

Volumn 401-402, Issue , 2007, Pages 597-599

  Shimizu, Yasuo ^a   Takano, Akio ^b   Uematsu, Masashi ^a   Itoh, Kohei M ^a  

^a KEIO UNIVERSITY   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

Author keywords

Defects; Diffusion; Impurities; Isotopes

Indexed keywords

DIFFUSION; IMPURITIES; ION IMPLANTATION; ISOTOPES; SECONDARY ION MASS SPECTROMETRY; SILICON COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS LAYER; SILICON HOST ATOMS;

SUPERLATTICES;

EID: 36048930144     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2007.09.030     Document Type: Article

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