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Biomedical Microdevices

Volumn 9, Issue 6, 2007, Pages 815-821

Fabrication of polymer microstructures for MEMS: Sacrificial layer micromolding and patterned substrate micromolding

(3) Ferrell, Nicholas a Woodard, James a Hansford, Derek a

a OHIO STATE UNIVERSITY (United States)

Author keywords

MEMS; Micromolding; Polymer; Polymer microstructures

Indexed keywords

BIOMEDICAL EQUIPMENT; CRYSTAL MICROSTRUCTURE; MEMS; MICROFABRICATION; MOLDING;

MICROMOLDING; POLYMER MICROSTRUCTURE; THERMAL MOLDING PROCESS;

ORGANIC POLYMERS;

POLYMER; POLYMETHACRYLIC ACID; POLYSTYRENE;

ARTICLE; DEVICE; MATERIALS TESTING; MICROELECTROMECHANICAL SYSTEM; PRIORITY JOURNAL; SYNTHESIS; WATER IMMERSION;

BIOCOMPATIBLE MATERIALS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MICROFLUIDICS; MINIATURIZATION; POLYMERS; SURFACE PROPERTIES;

EID: 35649027282 PISSN: 13872176 EISSN: None Source Type: Journal
DOI: 10.1007/s10544-007-9094-y Document Type: Article

Times cited : (38)

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