Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas

Journal of Applied Physics

Volumn 81, Issue 9, 1997, Pages 5945-5949

  Woodcock, B K ^a,b   Busby, J R ^a,c   Freegarde, T G M ^a   Hancock, G ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b Poplar House   (United Kingdom)

^c UNIVERSITY OF YORK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000023033     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364382     Document Type: Article

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