Ridge optical waveguide in an Er3+/Yb3+ co-doped phosphate glass produced by He+ ion implantation combined with Ar+ ion beam etching

Journal of Physics D: Applied Physics

Volumn 40, Issue 21, 2007, Pages 6545-6548

  Tan, Yang ^a   Chen, Feng ^a   Hu, Li Li ^b   Xing, Peng Fei ^a   Chen, Yan Xue ^a   Wang, Xue Lin ^a   Wang, Ke Ming ^a  

^a SHANDONG UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER APPLICATIONS; ETCHING; ION BEAMS; ION IMPLANTATION; PHOSPHATES; PHOTORESISTS; REFRACTIVE INDEX;

ION BEAM ETCHING; PHOSPHATE GLASS SUBSTRATES; PHOTORESIST MASKS; WAVEGUIDE FORMATION;

OPTICAL WAVEGUIDES;

EID: 35548933387     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/21/013     Document Type: Article

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