In situ bulge testing in an atomic force microscope: Microdeformation experiments of thin film membranes

Journal of Materials Research

Volumn 22, Issue 10, 2007, Pages 2902-2911

  Schweitzer, Elmar W ^a   Goken M ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL MICROSTRUCTURE; DEFORMATION; ELASTIC MODULI; MEMBRANES; NANOINDENTATION; SILICON NITRIDE; STRESS-STRAIN CURVES;

BULGE TESTING; MICRODEFORMATION;

THIN FILMS;

EID: 35449001635     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0373     Document Type: Article

References (19)

1. E. Arzt: Size effects in materials due to microstructural and dimensional constraints: A comparative review. Acta Mater. 46, 5611 (1998).
2. J.W. Beams: Mechanical properties of thin films of gold and silver. In Proceedings, International Conference on Structure and Properties of Thin Films, Bolton Landing, NY, 1959, edited by C.A. Neugebauer, J.B. Newkirk, and D.A. Vermilya (John Wiley, New York, 1959), pp. 183-192.
3. O. Tabata, K. Kawahata, S. Sugiyama, and I. Igarashi: Mechanical property measurements of thin films using load-deflection of composite rectangular membranes. Sens. Actuators, A 20, 135 (1989).
4. A. Karimi, O.R. Shojaei, T. Kruml, and J.L. Martin: Characterisation of tin thin films using the bulge test and the nanoindentation technique. Thin Solid Films 308-309, 334 (1997).
5. Y. Xiang, X. Chen, and J.J. Vlassak: Plain-strain bulge test for thin films. J. Mater. Res. 20, 2360 (2005).
6. G. Binnig, C.F. Quante, and Ch. Gerber: Atomic force microscope. Phys. Rev. Lett. 56, 930 (1986).
7. J.J. Vlassak and E.D. Nix: A new bulge testing technique for the determination of Young's modulus and Poisson's ratio of thin films. J. Mater. Res. 7, 3242 (1992).
8. E.I. Bromley, J.N. Randall, D.C. Flanders, and R.W. Mountain: A technique for the determination of stress in thin films. J. Vac. Sci. Technol., B 1, 1364 (1993).
9. A.J. Kalman, A.H. Verbruggen, and G.C.A.M. Jannsen: A novel bulge-testing seup for rectangular free-standing thin films. Rev. Sci. Instrum. 70, 4026 (1999).
10. A. Catlin and W.P. Walker: Mechanical properties of thin single-crystal gold films. J. Appl. Phys. 31, 2135 (1960).
11. M.K. Small and W.D. Nix: Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films. J. Mater. Res. 7, 1553 (1992).
12. K. Durst, M. Göken, and H. Vehoff: Finite element study for nanoindentation measurements on two-phase materials. J. Mater. Res. 19, 85 (2004).
13. M. Göken, M. Kempf, M. Bordenet, and H. Vehoff: Nanomechanical characterization of metals and thin films. Surf. Interface Anal. 27, 302 (1999).
14. W.C. Oliver and G.M. Pharr: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).
15. Hütte - Das Ingenieurwissen, 32nd ed., edited by H. Czichos and M. Hennecke (Springer-Verlag, Heidelberg, 2004), p. E66.
16. Y-G. Jung, B.R. Lawn, M. Martyniuk, H. Huang, and X.Z. Hu: Evaluation of elastic modulus and hardness of thin films by nanoindentation. J. Mater. Res. 19, 3076 (2004).
17. A.R. Reinberg: Plasma deposition of inorganic thin films. Annu. Rev. Mater. Sci. 9, 341 (1979).
18. User manual: Dimension 3100™ Scanning Probe Microscope. Digital Instruments-Veeco Metrology Group, Chadds Ford, PA, 2003.
19. J.J. Vlassak: New experimental techniques and analysis methods for the study of mechanical properties of materials in small volumes. Ph.D. Dissertation, Stanford University, Stanford, CA, 1994.