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Volumn 20, Issue 11, 2000, Pages 1359-1371

Systematic layout planning: A study on semiconductor wafer fabrication facilities

Author keywords

Analytical hierarchy process; Decision making; Layout; Material handling; Semiconductors

Indexed keywords


EID: 3543092650     PISSN: 01443577     EISSN: None     Source Type: Journal    
DOI: 10.1108/01443570010348299     Document Type: Article
Times cited : (105)

References (14)
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    • (1995) IEEE Transactions on Semiconductor Manufacturing , vol.8 , Issue.1
    • Cardarelli, G.1    Pelagagge, P.J.2
  • 6
    • 0023451328 scopus 로고
    • The theory of ratio scale estimation: Saaty's analytic hierarchy process
    • Harker, P.T. and Vargas, L.G. (1987), "The theory of ratio scale estimation: Saaty's analytic hierarchy process", Management Science, Vol. 33, pp. 1383-403.
    • (1987) Management Science , vol.33
    • Harker, P.T.1    Vargas, L.G.2
  • 7
    • 33749834100 scopus 로고    scopus 로고
    • The facility layout problem: Recent and emerging trends and perspectives
    • Meller, R.D. and Gau, K.Y. (1996), "The facility layout problem: recent and emerging trends and perspectives", Journal of Manufacturing Systems, Vol. 15 No. 5, pp. 351-66.
    • (1996) Journal of Manufacturing Systems , vol.15 , Issue.5
    • Meller, R.D.1    Gau, K.Y.2
  • 9
    • 0031340904 scopus 로고    scopus 로고
    • Incorporating manufacturing objectives into the semiconductor facility layout design process: A methodology and selected cases
    • Boston, MA
    • Padillo, J.M., Meyersdorf, D. and Reshef, O. (1997), "Incorporating manufacturing objectives into the semiconductor facility layout design process: a methodology and selected cases", IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Boston, MA, pp. 434-9.
    • (1997) IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
    • Padillo, J.M.1    Meyersdorf, D.2    Reshef, O.3
  • 10
    • 0031200370 scopus 로고    scopus 로고
    • Integrated facility layout and material handling system design in semiconductor fabrication facilities
    • Peters, B.A and Yang, T. (1997), "Integrated facility layout and material handling system design in semiconductor fabrication facilities", IEEE Transactions on Semiconductor Manufacturing, Vol. 10 No. 3, pp. 360-9.
    • (1997) IEEE Transactions on Semiconductor Manufacturing , vol.10 , Issue.3
    • Peters, B.A.1    Yang, T.2
  • 14
    • 3543064131 scopus 로고    scopus 로고
    • A spine layout design method for semiconductor fabrication facilities containing automated material handling systems
    • Yang, T. and Peters, B.A. (1997), "A spine layout design method for semiconductor fabrication facilities containing automated material handling systems", International Journal of Operations and Production Management, Vol. 17 No. 5, pp. 490-501.
    • (1997) International Journal of Operations and Production Management , vol.17 , Issue.5
    • Yang, T.1    Peters, B.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.