Statistical yield modeling for IC manufacture: Hierarchical fault distributions

Russian Microelectronics

Volumn 32, Issue 1, 2003, Pages 51-62

  Bogdanov, Yu I ^a   Bogdanova, N A ^b   Dshkhunyan, V L ^a  

^a OAO Angstrem   (Russian Federation)

^b NATIONAL RESEARCH UNIVERSITY OF ELECTRONIC TECHNOLOGY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTRIC FAULT CURRENTS; ERROR ANALYSIS; INTEGRATED CIRCUITS; OPTIMIZATION; PROBABILITY DENSITY FUNCTION; STATISTICAL METHODS;

BAYESIAN APPROACH; BINOMIAL DISTRIBUTIONS; COMPOUND DISTRIBUTIONS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 3543057684     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1021813903727     Document Type: Article

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