Near cathode optical emission spectroscopy in N2-H2 glow discharge plasma

Surface and Coatings Technology

Volumn 202, Issue 2, 2007, Pages 301-309

  Suraj, K S ^a   Bharathi, P ^a   Prahlad, V ^a   Mukherjee, S ^a  

^a INSTITUTE FOR PLASMA RESEARCH   (India)

Author keywords

Adsorption; Cathode sheath; Optical emission spectroscopy; Plasma nitriding; Spectral intensity

Indexed keywords

ADSORPTION; GLOW DISCHARGES; HYDROGEN; NITRIDING; OPTICAL EMISSION SPECTROSCOPY; PLASMA SHEATHS;

GLOW DISCHARGE PLASMA; NON-INTRUSIVE DIAGNOSTIC TECHNIQUE; PLASMA NITRIDING; QUALITATIVE ANALYSIS;

PLASMA DEPOSITION;

ADSORPTION; GLOW DISCHARGES; HYDROGEN; NITRIDING; OPTICAL EMISSION SPECTROSCOPY; PLASMA DEPOSITION; PLASMA SHEATHS;

EID: 35348822427     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.05.063     Document Type: Article

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