Power balance at cathode in glow discharges

Physics of Plasmas

Volumn 12, Issue 11, 2005, Pages 1-6

  Suraj, K S ^a   Mukherjee, S ^a  

^a INSTITUTE FOR PLASMA RESEARCH   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CATHODES; GLOW DISCHARGES; IONS; PARAMETER ESTIMATION; THERMAL EFFECTS;

METALLIC CHAMBERS; POWER BALANCE; THERMAL INFLUX; VELOCITY DISTRIBUTIONS;

PLASMAS;

EID: 28444464474     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2127929     Document Type: Article

References (19)

1. M. A. Lieberman and A. J. Lichenberg, Principle of Plasma Discharges and Material Processing (Wiley, New York, 1994).
2. H. Kersten, H. Deutsch, H. Steffen, G. M. W. Kroesen, and R. Hippler, Vacuum 63, 385 (2001).
3. I. V. Afanasyev-Charkin and M. Nastasi, Appl. Phys. Lett. 85, 718 (2004).
4. Y. Gong, X. Wang, P. Duan, J. Yu, and D. Wang, Phys. Plasmas 12, 43501 (2005).
5. A. V. Phelps, J. Phys. Chem. Ref. Data 20, 557 (1991).
6. W. D. Davis and T. A. Vanderslice, Phys. Rev. 131, 237 (1963).
7. D. Wang, J. Appl. Phys. 85, 3949 (1999).
8. S. Mukherjee, IEEE Trans. Plasma Sci. 23, 816 (1995).
9. S. Mukherjee, Phys. Plasmas 8, 364 (2001).
10. K. S. Suraj and S. Mukherjee, Surf. Coat. Technol. 196, 267 (2005).
11. R. Wendt and K. Ellmer, J. Appl. Phys. 82, 2115 (1997).
12. J. Walkowicz, Surf. Coat. Technol. 174-175, 1211 (2003).
13. J. Y. Liu, Z. X. Wang, and X. Wang, Phys. Plasmas 10, 3032 (2003).
14. T. E. Sheridan and J. Goree, IEEE Trans. Plasma Sci. 17, 884 (1989).
15. T. E. Sheridan and J. Goree, Phys. Fluids B 3, 2796 (1991).
16. N. Hilleret, V. Baglin, J. Bojko, O. Grobner, B. Henrist, C. Scheuerlein, and M. Taborelli, Proceedings of Invited Papers, Seventh European Particle Accelerator Conference, Vienna, 2000, edited by, J. L. Laclare, W. Mitaroff, C. Petit-Jean-Genaz, J. Poole, and, M. Regler, (Austrian Academy of Science Press, Vienna, 2000), p. 217.
17. U. Littmark and J. F. Ziegler, in The Stopping and Range of Ions in Solids, edited by, J. F. Ziegler, (Pergamon, New York, 1980), Vol. 6; Can be downloaded from www.srim.org
18. U. Littmark and J. F. Ziegler, in The Stopping and Range of Ions in Solids, edited by, J. F. Ziegler, (Pergamon, New York, 1980), Vol. 6; Can be downloaded from www.srim.org
19. G. F. Hewitt, G. L. Shires, and T. R. Bott, Process Heat Transfer (CRC, Boca Raton, 1994).