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Volumn 180, Issue 10, 2007, Pages 2696-2701
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Surface chemistry and optical property of TiO2 thin films treated by low-pressure plasma
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Author keywords
Optical property; Plasma treatment; Surface states; Thin film; TiO2
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Indexed keywords
HEATING;
MAGNETRON SPUTTERING;
OPTICAL PROPERTIES;
PLASMAS;
SURFACE CHEMISTRY;
TITANIUM DIOXIDE;
X RAY DIFFRACTION;
LOW PRESSURE PLASMAS;
PLASMA TREATMENT;
SURFACE STATES;
THIN FILMS;
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EID: 35248860170
PISSN: 00224596
EISSN: 1095726X
Source Type: Journal
DOI: 10.1016/j.jssc.2007.06.037 Document Type: Article |
Times cited : (33)
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References (25)
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