Piezoactuator design considering the optimum placement of FGM piezoelectric material

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6523, Issue , 2007, Pages

  Carbonari, Ronny C ^a   Nishiwaki, Shinji ^b   Paulino, Glaucio H ^c   Silva, Emílio C Nelli ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b KYOTO UNIVERSITY   (Japan)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

FGM; Finite element analysis; MEMS; Nanopositioners; Piezoelectric actuators; Topology optimization

Indexed keywords

DIELECTRIC PROPERTIES; FINITE ELEMENT METHOD; FUNCTIONALLY GRADED MATERIALS; MEMS; MICROSTRUCTURE; PIEZOELECTRIC ACTUATORS; SHAPE OPTIMIZATION;

OPTIMUM GRADATIONS; PIEZOACTUATOR DESIGNS; PIEZOCERAMICS; PIEZOELECTRIC MECHANISMS;

PIEZOELECTRIC MATERIALS;

EID: 35148888153     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.715411     Document Type: Conference Paper

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