Design and fabrication of micromachined gas sensors

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

Volumn , Issue , 2006, Pages 98-101

  Hiskia, ^a   Siregar, Masbah R T ^a   Muljono, Moch ^a  

^a INDONESIAN INSTITUTE OF SCIENCES   (Indonesia)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON MONOXIDE; ELECTRIC POWER UTILIZATION; MICROFABRICATION; MICROMACHINING; PLATINUM; TIN OXIDES;

MICRO FABRICATION TECHNOLOGY; MICROMACHINED GAS SENSORS; MINIATURIZED GAS SENSORS; THIN MEMBRANE;

CHEMICAL SENSORS;

EID: 35148849646     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMELEC.2006.381027     Document Type: Conference Paper

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