Hybrid integrated silicon microfluidic platform for fluorescence based biodetection

Sensors

Volumn 7, Issue 9, 2007, Pages 1901-1915

  Chandrasekaran, Arvind ^a   Acharya, Ashwin ^a   You, Jian Liang ^a   Soo, Kim Young ^a   Packirisamy, Muthukumaran ^a   Stiharu, Ion ^a   Darveau, Andre ^b  

^a Civil and Environmental Engineering   (Canada)

^b UNIVERSITÉ LAVAL   (Canada)

Author keywords

Anisotropic etching; Biosensing; Fluorescence; Immobilization; Lab on a chip; Micro Opto Electro Mechanical Systems (MOEMS); Microfluidics; Spectrometer on chip

Indexed keywords

ANISOTROPIC ETCHING; ANTIGENS; BIOMEDICAL ENGINEERING; COST EFFECTIVENESS; DISPOSABILITY; FLUIDIC DEVICES; FLUORESCENCE; INTEGRATION TESTING; LAB-ON-A-CHIP; LABORATORIES; MECHANICS; MEMS; MOEMS; RADIOACTIVE WASTE VITRIFICATION; SILICON; SPECTROMETERS;

BIOSENSING; BULK MICROFABRICATION; LAB-ON-A-CHIP DEVICES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICRO-FLUIDIC DEVICES; MICROFLUIDIC PLATFORMS; ON CHIPS;

MICROFLUIDICS;

EID: 34948864423     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s7091901     Document Type: Article

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