Experimental study of nanoparticle generation during high-density plasma chemical vapor deposition of poly-silicon films

Journal of the Korean Physical Society

Volumn 51, Issue 3, 2007, Pages 1187-1190

  Kim, Taesung ^a   Choi, Jae Boong ^a   Kim, Youngjin ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

High density plasma; Plasma enhanced chemical vapor deposition; Silicon nanoparticle generation

Indexed keywords

EID: 34948841985     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.51.1187     Document Type: Article

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