Novel fabrication method for three-dimensional nanostructuring: An application to micro-optics

Nanotechnology

Volumn 18, Issue 38, 2007, Pages

  Tormen, Massimo ^a   Carpentiero, Alessandro ^a   Ferrari, Enrico ^a,b   Cojoc, Dan ^a   Fabrizio, Enzo Di ^a,c  

^a LABORATORIO TASC   (Italy)

^b UNIVERSITY OF TRIESTE   (Italy)

^c UNIVERSITY MAGNA GRAECIA OF CATANZARO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CASTING; ETCHING; GLASS; LITHOGRAPHY; MICROOPTICS; QUARTZ; SURFACE ROUGHNESS; THREE DIMENSIONAL;

PLASTIC ELEMENTS; QUARTZ SURFACE; REFRACTIVE OPTICAL ELEMENTS;

NANOSTRUCTURED MATERIALS;

NANOMATERIAL; PLASTIC; POLYMER; SILICON DIOXIDE;

ARTICLE; CHEMICAL STRUCTURE; ILLUMINATION; NANOFABRICATION; PARTICLE SIZE; PRIORITY JOURNAL; THREE DIMENSIONAL IMAGING;

EID: 34848925118     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/38/385301     Document Type: Article

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