Non-selective NDIR array for gas detection

Sensors and Actuators, B: Chemical

Volumn 127, Issue 1, 2007, Pages 69-73

  Rubio, R ^a   Santander, J ^a   Fonseca, L ^a   Sabate N ^a   Gracia I ^a   Cane C ^a   Udina, S ^b   Marco, S ^b  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Gas sensor; Microsystems; NDIR

Indexed keywords

ACETONE; CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; INFRARED RADIATION; MICROSYSTEMS; OPTICAL SYSTEMS; THERMOPILES;

GAS CELLS; GAS SENSORS ARRAYS; IR TRANSPARENT LENSES; VOLATILE COMPOUNDS;

GAS DETECTORS;

EID: 34848918596     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.07.003     Document Type: Article

References (11)

1. Infrared Methods for Gaseous Measurements (1985), Marcel Dekker, New York
2. Lammel G., Schweizer S., Schiesser S., and Renaud P. Tunable optical filter of porous silicon as key component for a MEMS spectrometer. J. Microelectromech. Syst. 11 (2002) 815-828
3. Calaza C., Meca E., Marco S., Moreno M., Samitier J., Fonseca L., Gracia I., and Cane C. Assessment of the final metrological characteristics of a MOEMS-based NDIR spectrometer through system modeling and data processing. IEEE Sens. J. 3 (2003) 587-594
4. Calaza C., Fonseca L., Moreno M., Marco S., Cane C., and Gracia I. A surface micromachining process for the development of a medium infrared tuneable Fabry-Perot interferometer. Sens. Actuators A: Phys. 113 (2004) 39-47
5. Baren R.E., Parrish M.E., Shafer K.H., Harward C.N., Quan S., Nelson D.D., McManus J.B., and Zahniser M.S. Quad quantum cascade laser spectrometer with dual gas cells for the simultaneous analysis of mainstream and sidestream cigarette smoke. Spectrochim. Acta, Part A: Mol. Biomol. Spectrosc. 60 (2004) 3437-3447
6. Andrews D.A., and King T.A. Gas analysis using an infrared source with temporally varying temperature. Measur. Sci. Technol. 12 (2001) 1263-1269
7. Muller J., and Dillner U. Thermal microsensors: their bases, principles and applications. Sens. Mater. 8 (1996) U4-U6 (special issue)
8. Calaza C., Fonseca L., Moreno M., Marco S., Cane C., and Gracia I. Design and fabrication of CMOS compatible thermoelectric IR sensors for gas analysing system. Acta Conf. Dispositivos Electrón. (2001) 45-49
9. Calaza C., Moreno M., Marco S., Fonseca L., Cane C., Gracia I., Fourniols J.Y., Soto-Romero G., and Bony F. Design, fabrication and characterisation of CMOS compatible thermoelectric IR sensors for a gas analysis application. Presented at IRS2. Erfut, Germany (2002)
10. Fonseca L., Santander J., Rubio R., Sabaté N., Figueras E., Duch M., Gràcia I., and Cane C. Use of boron heavily doped silicon slabs for gas sensors based on free standing membranes. Presented at IMCS. Brescia (2006)
11. Rubio R., Santander J., Fonollosa J., Marco S., Fonseca L., and Moreno M. Exploration of the metrological performance of a gas detector based on an array of unspecific infrared filters. Sens. Actuators B: Chem. 116 (2006) 183-191