Low temperature deposition of epitaxial BaTi O3 films in a rotating disk vertical MOCVD reactor

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 4, 2005, Pages 1674-1678

  Dhote, A M ^a   Meier, A L ^a   Towner, D J ^a   Wessels, B W ^a   Ni, J ^b   Marks, T J ^b  

^a Northwestern University   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; CHEMICAL REACTORS; CRYSTAL ORIENTATION; MAGNESIA; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MIXTURES; ORGANOMETALLICS; TITANIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

CUBE-ON-CUBE ORIENTATION; ROTATING DISK; TITANIUM TETRAISOPROPOXIDE;

SUPERCONDUCTING FILMS;

EID: 31144467733     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1993621     Document Type: Article

References (17)

1. P. Tang, D. J. Towner, A. L. Meier, and B. W. Wessels, Appl. Phys. Lett. 85, 1 (2004).
2. D. M. Gill, B. A. Block, C. W. Conrad, G. Ford, B. W. Wessels, and S. T. Ho, Appl. Phys. Lett. 69, 2968 (1996).
3. D. M. Gill, C. W. Conrad, B. W. Wessels, and S. T. Ho, Appl. Phys. Lett. 71, 1783 (1997).
4. F. Niu, B. Hoerman, and B. W. Wessels, J. Vac. Sci. Technol. B 18, 2146 (2000).
5. F. Niu, A. R. Teren, B. H. Hoerman, and B. W. Wessels, Mater. Res. Soc. Symp. Proc. 637, E1.9 (2001).
6. D. J. Towner, J. Ni, T. J. Marks, and B. W. Wessels, J. Cryst. Growth 255, 107 (2003).
7. A. R. Teren, J. A. Belot, N. L. Edleman, T. J. Marks, and B. W. Wessels, Chem. Vap. Deposition 6, 175 (2000).
8. L. A. Wills, B. W. Wessels, D. S. Richeson, and T. J. Marks, Appl. Phys. Lett. 60, 41 (1992).
9. H. Nakazawa, H. Yamane, and T. Hirai, Jpn. J. Appl. Phys., Part 1 30, 2200 (1991).
10. C. S. Chern, J. Zhao, L. Luo, P. Lu, Y. Q. Li, P. Norris, B. Kear, F. Cosandey, C. J. Maggiore, B. Gallois, and B. J. Wilkens, Appl. Phys. Lett. 60, 1144 (1992).
11. B. S. Kwak, K. Zhang, E. P. Boyd, A. Erbil, and B. J. Wilkens, J. Appl. Phys. 69, 767 (1991).
12. P. C. Van Buskirk, R. Gardiner, P. S. Kirlin, and S. Nutt, J. Mater. Res. 7, 542 (1992).
13. J. Zhao, V. Fuflying, F. Wang, P. Norris, L. Bouthilette, and C. Woods, J. Mater. Chem. 7, 933 (1997).
14. D. L. Kaiser, M. D. Vaudin, L. D. Rotter, Z. L. Wang, J. P. Cline, C. S. Hwang, R. B. Marinenko, and J. G. Gillen, Appl. Phys. Lett. 66, 22 (1995).
15. J. A. Belot, C. J. Reedy, D. B. Studebaker, D. A. Neumayer, B. J. Hinds, C. L. Stern, and T. J. Marks, Chem. Mater. 9, 1638 (1997).
16. B. W. Wessels, Annu. Rev. Mater. Sci. 25, 525 (1995).
17. G. S. Tompa, A. Colibaba-Evulet, J. D. Cuchiaro, L. G. Provost, D. Hadnagy, T. Davenport, S. Sun, F. Chu, G. Fox, R. J. Doppelhammer, and G. Heubner, Integr. Ferroelectr. 36, 135 (2001).