Diamond AFM probe with piezoelectric sensor and actuator

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 500-503

  Shibata, T ^a   Unno, K ^b   Makino, E ^c  

^a IBARAKI UNIVERSITY   (Japan)

^b HOKKAIDO UNIVERSITY   (Japan)

^c HIROSAKI UNIVERSITY   (Japan)

Author keywords

Etching; Image resolution; Piezoelectric actuators; Piezoelectric films; Plasma temperature; Probes; Sputtering; Substrates; Thin film sensors; Titanium compounds

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; DIAMOND FILMS; DIAMONDS; ELECTRIC SENSING DEVICES; ETCHING; FERROELECTRIC CERAMICS; FILM THICKNESS; IMAGE RESOLUTION; MICROSYSTEMS; PIEZOELECTRIC DEVICES; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PROBES; REACTIVE ION ETCHING; SEMICONDUCTING LEAD COMPOUNDS; SOLID-STATE SENSORS; SPUTTERING; SUBSTRATES; THIN FILMS; TITANIUM COMPOUNDS; TRANSDUCERS;

LEAD ZIRCONATE TITANATE THIN FILMS; MICRO-FABRICATION TECHNIQUES; PIEZOELECTRIC CONSTANT; PIEZOELECTRIC FILM; PIEZOELECTRIC PROPERTY; PIEZOELECTRIC SENSOR AND ACTUATOR; PLASMA TEMPERATURE; THIN FILM SENSORS;

PIEZOELECTRIC ACTUATORS;

EID: 34748909807     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215363     Document Type: Conference Paper

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