Effect of processing parameters on the deposition rate of Si 3N4/Si2N2O by chemical vapor infiltration and the in situ thermal decomposition of Na2SiF 6

Applied Physics A: Materials Science and Processing

Volumn 89, Issue 3, 2007, Pages 729-735

  Pech Canul, M I ^a   De La Pena J L ^a   Leal Cruz, A L ^a  

^a Cinvestav Carretera Saltillo Monterrey ^*

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR INFILTRATION; DEPOSITION RATES; NITROGEN; PARAMETER ESTIMATION; PARTIAL PRESSURE; PYROLYSIS; SODIUM COMPOUNDS;

INCUBATION; NITROGEN PRECURSORS;

SILICON NITRIDE;

EID: 34748902288     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-007-4153-z     Document Type: Article

References (16)

1. E. Hagen, T. Grande, M.-A. Einarsrud, J. Am. Ceram. Soc. 87, 1200 (2004)
2. X. Pu, X. Liu, F. Qiu, L. Huang, J. Am. Ceram. Soc. 87, 1392 (2004)
3. W.E. Lee, W.M. Rainforth, Ceramic Microstructures, Property Control by Processing (Chapman & Hall, New York, 1994)
4. R.F. Bunshah et al., Deposition Technologies for Films and Coatings (Noyes Publications, Park Ridge, NJ, 1982)
5. N. Ichinose, Introduction to Fine Ceramics Applications in Engineering (John Wiley & Sons Ltd., New York, 1987)
6. K.L. Choy, Prog. Mater. Sci. 48, 57 (2003)
7. F.S. Galasso, R.D. Veltri, W.J. Croft, Am. Ceram. Soc. Bull. 57, 353 (1978)
8. R.S. Larson, J. Am. Ceram. Soc. 76, 1930 (1993)
9. O. Sanchez, J.M. Martinez-Duart, R.J. Gomez-Sanroman, M.A. Aguilar, C. Falcony, F. Fernandez-Gutierrez, M. Hernández-Vélez, J. Mater. Sci. 34, 3007 (1999)
10. S. Fujita, A. Sasaki, J. Electrochem. Soc. 135, 2566 (1988)
11. A.K. Misra, NASA Contractor Report 4271 (Lewis Research Center, 1990), available online
12. R.S. Parikh, A. Lightfoot, J.S. Haggerty, B.W. Sheldon, J. Am. Ceram. Soc. 82, 2626 (1999)
13. A.L. Leal-Cruz, M.I. Pech-Canul, J. Mater. Chem. Phys. 98, 27 (2006)
14. R. Roy, A Primer on the Taguchi Method (Society of Manufacturing Engineers, Dearborn, MI, 1990)
15. Z. Sassi, K. Chafik, J.C. Bureau, A. Glachant, B. Balland, Appl. Surf. Sci. 193, 26 (2002)
16. Z.R. Jovanovic, J. Mater. Sci. 33, 2339 (1998)