Experimental and model-based study of the robustness of line-edge roughness metric extraction in the presence of noise

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 5, 2007, Pages 1647-1657

  Naulleau, Patrick P ^a   Cain, Jason P ^b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; DATA STRUCTURES; POWER SPECTRAL DENSITY; SENSITIVITY ANALYSIS; SURFACE ROUGHNESS;

LINEWIDTH ROUGHNESS (LWR); METRIC EXTRACTION; SPATIAL DESCRIPTORS;

LINEWIDTH;

EID: 34648826643     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2778697     Document Type: Article

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