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Volumn 360, Issue 1-2, 2000, Pages 75-81
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Improved ITO thin films with a thin ZnO buffer layer by sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER CONCENTRATION;
CARRIER MOBILITY;
CRYSTAL ORIENTATION;
CRYSTAL STRUCTURE;
ELECTRIC CONDUCTIVITY OF SOLIDS;
GLASS;
HALL EFFECT;
MAGNETRON SPUTTERING;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTING ZINC COMPOUNDS;
SEMICONDUCTOR DOPING;
TIN;
BUFFER LAYER;
INDIUM TIN OXIDE;
OXYGEN RATIO;
POLYCRYSTALLINE STRUCTURE;
THIN FILMS;
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EID: 0034140723
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(99)01077-9 Document Type: Article |
Times cited : (107)
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References (11)
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