Investigation of structural properties of ITO thin films deposited on different substrates

Thin Solid Films

Volumn 515, Issue 24 SPEC. ISS., 2007, Pages 8674-8678

  Purica, M ^a   Iacomi, F ^b   Baban, C ^b   Prepelita, P ^b   Apetroaei, N ^b   Mardare, D ^b   Luca, D ^b  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

Author keywords

ITO; Optical properties; Structure; Surface wetting; Thermal deposition

Indexed keywords

OPTICAL PROPERTIES; RAPID THERMAL ANNEALING; SUBSTRATES; THERMAL EVAPORATION; THIN FILMS; X RAY DIFFRACTION;

ITO THIN FILMS DEPOSITION; SURFACE WETTING; SURFACE WETTING PROPERTIES; THERMAL DEPOSITION;

FILM GROWTH;

EID: 34548817864     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.117     Document Type: Article

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