Deposition of ZnO inclined c-axis on silicon and diamond by r.f. magnetron sputtering

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 9, 2007, Pages 3091-3095

  Bensmaine, S ^a,b   Le Brizoual, L ^a   Elmazria, O ^a,d   Fundenberger, J J ^c   Benyoucef, B ^b  

^a INSTITUT JEAN LAMOUR   (France)

^b UNIVERSITY OF TLEMCEN   (Algeria)

^c UNIVERSITÉ PAUL VERLAINE METZ   (France)

^d UNIVERSITÉ DE LORRAINE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

C-AXIS ANGLE; FILM MORPHOLOGY; FILM TEXTURES; WURTZITE;

CHARACTERIZATION; CRYSTAL STRUCTURE; DEPOSITION; DIAMONDS; MAGNETRON SPUTTERING; NUCLEATION; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; X RAY DIFFRACTION; ZINC OXIDE;

THIN FILMS;

EID: 34548809772     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200776322     Document Type: Conference Paper

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