XPS study on the correlation between chemical state and oxygen-sensing properties of an iron oxide thin film

Applied Surface Science

Volumn 253, Issue 24, 2007, Pages 9476-9482

  Aronniemi, M ^a   Sainio, J ^a   Lahtinen, J ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Chemical state; Factor analysis; Gas sensor; Iron oxide; Oxygen; Thin film; XPS

Indexed keywords

DATA ACQUISITION; ELECTRIC CONDUCTIVITY; IRON OXIDES; OXYGEN VACANCIES; SPECTROMETERS; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

ARGON ION SPUTTERING; CHEMICAL STATE; FACTOR ANALYSIS; SENSOR RESISTANCE;

THIN FILMS;

EID: 34548503676     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.06.007     Document Type: Article

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