Surface modifications of crystalline silicon created by high intensity 1064 nm picosecond Nd:YAG laser pulses

Applied Surface Science

Volumn 253, Issue 24, 2007, Pages 9315-9318

  Trtica, M S ^a   Gakovic, B M ^a   Maravic, D ^a   Batani, D ^b   Desai, T ^b   Redaelli, R ^b  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF MILANO BICOCCA   (Italy)

Author keywords

Laser matter interaction; Picosecond Nd:YAG laser; Silicon

Indexed keywords

DEPOSITION RATES; LASER PULSES; MORPHOLOGY; SILICON;

LASER INTENSITIES; LASER MATTER INTERACTION; MASSIVE EJECTION; PHASE EXPLOSION;

CRYSTALLINE MATERIALS;

EID: 34548500352     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.05.080     Document Type: Article

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