UV/ozone degradation of gaseous hexamethyldisilazane (HMDS)

Chemosphere

Volumn 69, Issue 5, 2007, Pages 697-704

  Chou, Ming Shean ^a   Chang, Ken Lin ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Advanced oxidation processes; Decomposition; Efficiency index; UV O3

Indexed keywords

APPROXIMATION THEORY; ATMOSPHERIC HUMIDITY; CONCENTRATION (PROCESS); DEGRADATION; IRRADIATION; NANOTECHNOLOGY; OZONE; REACTION KINETICS; THERMAL EFFECTS;

ADVANCED OXIDATION PROCESSES; AIR SATURATED; ECONOMIC EVALUATION FACTORS; EFFICIENCY INDEX; LIFE SCIENCE MICROSCOPY;

BATCH REACTORS;

APPROXIMATION THEORY; ATMOSPHERIC HUMIDITY; BATCH REACTORS; CONCENTRATION (PROCESS); DEGRADATION; IRRADIATION; NANOTECHNOLOGY; OZONE; REACTION KINETICS; THERMAL EFFECTS;

CARCINOGEN; DECOMPOSITION; DEGRADATION; IRRADIATION; OXIDATION; OZONE; PHOTOLYSIS; ULTRAVIOLET RADIATION;

ARTICLE; ATMOSPHERE; BATCH REACTOR; DECOMPOSITION; DEGRADATION; ECONOMIC EVALUATION; HEXAMETHYLDISILAZANE; IRRADIATION; OXIDATION; OZONATION; PHOTOLYSIS; REACTION TIME; SILYLATION; ULTRAVIOLET RADIATION; VOLUMETRY; WATER TEMPERATURE;

EID: 34548398495     PISSN: 00456535     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.chemosphere.2007.05.040     Document Type: Article

References (25)

1. Bhowmick M., and Semmens M.J. Ultraviolet photooxidation for the destruction of VOCs in air. Water Res. 28 (1994) 2407-2415
2. Bhowmick M., and Semmens M.J. Batch studies on a closed loop air stripping process. Water Res. 28 (2002) 2011-2019
3. Bolton J.R., Bircher K.G., Tumas W., and Tolman C.A. Figures-of-merit for the technical development and application of advanced oxidation technologies for both electric- and solar-driven systems. Pure Appl. Chem. 73 (2001) 627-637
4. Chen F., Pehkonen S.O., and Ray M.B. Kinetics and mechanisms of UV-photodegradation of chlorinated organics in the gas phase. Water Res. 36 (2002) 4203-4214
5. 2 using plasma enhanced chemical vapor deposition with hexamethyldisilazane. Surf. Coat. Technol. 131 (2000) 136-140
6. Chou M.S., Huang B.J., and Chang H.Y. Decomposition of gas phase 1,3-butadiene by ultraviolet/ozone process. J. Air Waste Manage. Assoc. 55 (2005) 919-929
7. Feitz A.J., Guan J., Chattopadhyay G., and Waite T.D. Photo-Fenton degradation of dichloromethane for gas phase treatment. Chemosphere 48 (2002) 401-406
8. Gun'ko V.M., Vedamuthu M.S., Henderson G.L., and Blitz J.P. Mechanism and kinetics of hexamethyldisilazane reaction with a fumed silica surface. J. Colloid Interf. Sci. 228 (2000) 157-170
9. Hunter P., and Oyama S.T. Control of Volatile Organic Compound Emissions (2000), John Wiley & Sons, Inc. p. 197
10. Ikematsu T., Hayashi N., and Ihara S. Advanced oxidation processes (AOPs) assisted by excimer lamp. Vacuum 73 (2004) 579-582
11. 2 catalyst: comparison of three UV sources. Chemosphere 57 (2004) 663-671
12. 2 photoirradiated by an ozone-producing UV lamp: decomposition characteristics, identification of by-products and water-soluble organic intermediates. J. Photochem. Photobiol. A 169 (2005) 279-287
13. Joe, D., Samuel, V., Roger, R., John, G., 2003. UT Dallas IC Fbrication Lboratory HMDS Pocess Stup 2-21-03. Erik Jonsson School of Engineering and Computer Science, University of Texas, Dallas, pp. 1-15.
14. Lab Manual, December 2005. .
15. Liu P.Y., and Chang F.T. Fluidized-bed adsorption system for VOCs treatment. Environ. Ind. 27 (2004) 10-13 (in Chinese)
16. Nien Y.T., Chen Y.L., Chen I.G., Hwang C.S., Su Y.K., Chang S.J., and Juang F.S. Synthesis of nano-scaled yttrium aluminum garnet phosphor by co-precipitation method with HMDS treatment. Mater. Chem. Phys. 93 (2005) 79-83
17. Oppenlander T. Photochemical Purification of Water and Air Advanced Oxidation Processes (AOPs): Principles, Reaction Mechanisms, Reactor Concept (2003), Wiley-VCH pp. 257-268
18. Parsons S. Advanced Oxidation Processes for Water and Wastewater Treatment (2004), IWA Publishing pp. 23-25
19. 2 films deposited on silicon at low temperature by plasma enhanced decomposition of hexamethyldisilazane. J. Non-Cryst. Solids 245 (1999) 20-26
20. 3 process. J. Hazard. Mater. 54 (1997) 189-200
21. 3 process. Water Res. 32 (1998) 2669-2679
22. 3 process. Chemosphere 38 (1999) 1855-1866
23. Wang J.H., and Ray M.B. Application of ultraviolet photooxidation to remove organic pollutants in the gas phase. Sep. Purif. Technol. 19 (2000) 11-20
24. Werner R.H., and Johnson M.D. Direct photolysis of trichloroethene in air: effect of cocontaminants, toxicity of products, and hydrothermal treatment of products. Environ. Sci. Technol. 30 (1996) 414-421
25. Zhang P., and Liu J. Photocatalytic degradation of trace hexane in the gas phase with and without ozone addition: kinetic study. J. Photochem. Photobiol. A 167 (2004) 87-94