Vacuum vapor deposition of PFPE molecules on CHxNy and CHxFy amorphous carbon surfaces

Microsystem Technologies

Volumn 13, Issue 8-10, 2007, Pages 1431-1437

  Kawaguchi, Masahiro ^a   Choi, Junho ^b   Kato, Takahisa ^c  

^a TOKYO METROPOLITAN INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; CHEMICAL VAPOR DEPOSITION; CONTAMINATION; DATA RECORDING; DIAMOND LIKE CARBON FILMS; LUBRICANTS; MAGNETIC STORAGE; TRIBOLOGY;

DIP-COATING METHOD; HEAD DISK INTERFACE (HDI); PFPE; VACUUM VAPOR DEPOSITION;

POLYETHERS;

EID: 34548244003     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0383-4     Document Type: Conference Paper

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