Selective functionalization of silicon micro/nanowire sensors via localized Joule heating

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 899-904

  Park, Inkyu ^a,b   Li, Zhiyong ^c   Pisano, Albert P ^a,b  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

Micro nano scale Joule heating; Selective surface functionalization; Silicon nanowire sensor; Thermal ablation of polymer

Indexed keywords

ELECTRIC HEATING ELEMENTS; MICROSENSORS; NANOWIRES; POLYTETRAFLUOROETHYLENES; THERMOANALYSIS;

MICRO/NANO-SCALE JOULE HEATING; SELECTIVE SURFACE FUNCTIONALIZATION; SILICON NANOWIRE SENSORS; SILICON OXIDE SURFACES; THERMAL ABLATION;

NANOSENSORS;

EID: 34548143332     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352163     Document Type: Conference Paper

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