Nanoparticle SnO2 gas sensor with circuit and micro heater on chip fabricated using CMOS-MEMS technique

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 959-963

  Dai, Ching Liang ^a   Liu, Mao Chen ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Circuits; Gas sensor; Micro heater

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC HEATING ELEMENTS; MEMS; NANOPARTICLES; TIN OXIDES;

GAS SENSING FILMS; INVERTING AMPLIFIER CIRCUITS; MICRO HEATERS;

CHEMICAL SENSORS;

EID: 34548143323     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352177     Document Type: Conference Paper

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