An electrohydrodynamic micropump for on-chip fluid pumping on a flexible parylene substrate

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 826-829

  Chen, Chia Ling ^a,b   Selvarasah, Selvapraba ^b   Chao, Shih Hsien ^b   Khanicheh, Azadeh ^c   Mavroidis, Constantinos ^c   Dokmeci, Mehmet R ^a,b  

^a IEEE

^b NORTHEASTERN UNIVERSITY   (United States)

^c Northeastern University   (United States)

Author keywords

Electrohydrodynamic (EHD); Flexible substrates; Microfluidics; Micropump; Parylene C

Indexed keywords

BIOTECHNOLOGY; CRYOGENICS; ELECTROHYDRODYNAMICS; FLOW VELOCITY; SUBSTRATES;

FLEXIBLE SUBSTRATES; MICROPUMPS; PARYLENE-C;

MICROFLUIDICS;

EID: 34548140520     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352145     Document Type: Conference Paper

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