Stainless-steel diaphragm micropump for micro-chemical processes

Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Volumn 1, Issue , 2005, Pages 1186-1188

  Aono, Takanori ^a,b   Koide, Akira ^b   Miyake, Ryo ^b   Kitamori, Takehiko ^c  

^a Research Association of Micro Chemical Process Technology (MCPT)   (Japan)

^b HITACHI LTD   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Diaphragm; Micropump; Piezoelectric stack actuator; Stainless steel

Indexed keywords

CHEMICAL ANALYSIS; DIAPHRAGMS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; PUMPS;

DIAPHRAGM MICROPUMP; HIGH DURABILITY; MICRO PUMP; ORGANIC SOLUTIONS; PIEZOELECTRIC STACK ACTUATORS;

STAINLESS STEEL;

EID: 34548138637     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. A. Manz and E. Becker (Eds.), Microsystem Technology in Chemistry and Life Science, Springer, p.p. 163-252, (1999).
2. A. Olsson, P. Enoksson, G. Stemme, and E. Stemme, An Improved Valve-less Pump Fabricated Using Deep Reactive Ion Etching, IEEE Micro Electro Mechanical Systems Workshop, p.p. 479-484, (1996).