Novel fabrication method of self positioned and focal length tuned microlens

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 372-375

  Jung, Sei Hwan ^a   Lee, Kook Nyung ^b   Jang, Yun Ho ^c   Kim, Yong Kweon ^d  

^a Samsung SDI   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

^c SAMSUNG Electronics   (South Korea)

^d Seoul National University   (South Korea)

Author keywords

Electrowetting; Focal length tuning; Hydrophobic effect; Microlens; Self positioning

Indexed keywords

ELECTRIC POTENTIAL; HYDROPHOBICITY; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

ELECTROWETTING; FOCAL LENGTH TUNING; HYDROPHOBIC EFFECTS; SELF POSITIONING;

MICROLENSES;

EID: 27544451210     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. Sung Kwon Cho, Hyejin Moon, and Chang-Jin Kim, "Creating, Transporting, Cutting, and Merging Liquid Droplets by Electrowetting-Based Actuation for Digital Microfluidic Circuits", Journal of Microelecromechanical Systems, Vol. 12, No. 1, pp.70-80, 2003.
2. Hyejin Moon, Sung Kwon Cho, Robin L. Garrell and Chang-Jin Kim, "Low voltage electrowetting-on-dielectric", Journal of Applied Physics, Vol. 92, No 7, pp. 4080-4087, 2002.
3. Sunghoon Kwon and Luke P. Lee, "Focal Length Control by Microfabricated Planar Electrodes-based Liquid Lens (μPELL)", 11th International conf. on solid-state sensors and actuator, Transducers'01, Germany, June 10-14, pp. 1348-1351, 2001.
4. T. Krupenkin, S. Yang, and P. Mach, "Tunable liquid microlens", Journal of Applied Physics, Vol. 82, No. 3, pp. 316-318, 2003.
5. Ph. Nussbaum, R. Völkel, H. P. Herzig, M. Eisner and S. Haselbeck, "Design, Fabrication and Testing of Microlens Arrays and Microsystems", Pure Appl. Opt., Vol. 6, pp. 617-636, 1997.
6. Ruther P, Gerlach B, Göttert J, Ilie M, Mohr J, Müller A and Oßmann C, "Fabrication and characterization of microlenses realized by a modified LIGA process", Pure Appl. Opt., Vol 6, pp. 643-653, 1997.
7. S. Kuiper and B. H. W. Hendriks, "Variable-focus liquid lens for miniature cameras", Applied Physics Letters, Vol. 85, No. 7, pp. 1128-1130, 2004.
8. B. Bergea and J. Peseux, "Variable focal lens controlled by an external voltage: An application of electrowetting", The European Physical Journal E, Vol. 3, pp. 159-163, 2000.
9. Hyuck Choo and Richard S. Muller, "Optical properties of microlens fabricated using hydrophobic effects and polymer-jet-printing technology", 2003 IEEE/LEOS International Conference on Optical MEMS, pp. 169-170, Aug 18-21. 2003.
10. Jung-Mu Kim and Yong-Kweon Kim, "Continuous anti-stiction coating using self-assembled monolayers for gold microstructures", Jounal of Microelecromechanical Systems, Vol. 12, pp.688-695, 2002.
11. Yung Chun Lee, Chun Ming Chen and Chun Ying Wu, "Fabrication of Aspheric Microlenses Using a New Excimer Laser Micromachining Method", International Conference on Electrical Engineering 2004, Vol. 3-1, pp. 291-296, 2004.