Probing fatigue in ferroelectric thin films with subnanometer depth resolution

Applied Physics Letters

Volumn 91, Issue 7, 2007, Pages

  Cao, Jiang Li ^a,b   Solbach, Axel ^a   Klemradt, Uwe ^a   Weirich, Thomas ^a   Mayer, Joachim ^a   Schorn, Peter J ^a   Böttger, Ulrich ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; FERROELECTRIC FILMS; POLARIZATION; SYNCHROTRON RADIATION;

HIGH-RESOLUTION GRAZING INCIDENCE X-RAY SPECULAR REFLECTIVITY; SUBNANOMETER DEPTH RESOLUTION;

THIN FILMS;

EID: 34548020296     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2771534     Document Type: Article

References (22)

1. J. F. Scott and C. A. Araujo, Science 246, 1400 (1989).
2. Nanoelectronics and Information Technology, edited by, R. Waser, (Wiley-VCH, Berlin, 2003), 387.
3. D. W. Bondurant and F. P. Gnadinger, IEEE Spectrum 26, 30 (1989).
4. J. F. Scott, C. A. Araujo, B. M. Melnick, L. D. McMillan, and R. Zuleeg, J. Appl. Phys. 70, 382 (1991).
5. K. Yoo and S. B. Desu, Mater. Sci. Eng., B 13, 319 (1992).
6. S. Pöykkö and D. J. Chadi, Phys. Rev. Lett. 83, 1231 (1999).
7. M. Dawber and J. F. Scott, Appl. Phys. Lett. 76, 1060 (2000).
8. J. F. Scott and M. Dawber, Appl. Phys. Lett. 76, 3801 (2000).
9. Y. Wang, Q. Y. Shao, and J. M. Liu, Appl. Phys. Lett. 88, 122902 (2006).
10. H. N. Al-Shareef, B. A. Tuttle, W. L. Warren, T. J. Headley, D. Dimos, J. A. Voigt, and R. D. Nasby, J. Appl. Phys. 79, 1013 (1996).
11. E. Chason and T. M. Mayer, Crit. Rev. Solid State Mater. Sci. 22, 1 (1997).
12. J. L. Cao, A. Solbach, U. Klemradt, T. Weirich, J. Mayer, U. Böttger, P. J. Schorn, and R. Waser, Appl. Phys. Lett. 89, 052901 (2006).
13. J. L. Cao, A. Solbach, and U. Klemradt, Physica B 357, 122 (2005).
14. P. K. Larsen, G. J. M. Dormans, D. J. Taylor, and P. J. Vanveldhoven, J. Appl. Phys. 76, 2405 (1994).
15. L. G. Parratt, Phys. Rev. 95, 359 (1954).
16. D. H. Do, P. G. Evans, E. D. Isaacs, D. M. Kim, C. B. Eom, and E. M. Dufresne, Nat. Mater. 3, 365 (2004).
17. J. Nuffer, D. C. Lupascu, J. Rödel, and M. Schroeder, Appl. Phys. Lett. 79, 3675 (2001).
18. X. J. Lou, X. B. Hu, M. Zhang, F. D. Morrison, S. A. T. Redfern, and J. F. Scott, J. Appl. Phys. 99, 044101 (2006).
19. K. Tagantsev, I. Stolichnov, E. L. Colla, and N. Setter, J. Appl. Phys. 90, 1387 (2001).
20. E. L. Colla, D. V. Taylor, A. K. Tagantsev, and N. Setter, Appl. Phys. Lett. 72, 2478 (1998).
21. W. L. Warren, D. Dimos, B. A. Tuttle, R. D. Nasby, and G. E. Pike, Appl. Phys. Lett. 65, 1018 (1994).
22. W. L. Warren, B. A. Tuttle, and D. Dimos, Appl. Phys. Lett. 67, 1426 (1995).