Design and fabrication of a high temperature pressure sensor

Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007

Volumn A, Issue , 2007, Pages 557-561

  Zhao, Libo ^a   Zhao, Yulong ^a   Jiang, Zhuangde ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Circular flat diaphragm; Harsh environment; High temperature pressure sensor; MEMS; Single crystal silicon strain gage; SOI

Indexed keywords

CIRCULAR FLAT DIAPHRAGM; HARSH ENVIRONMENT; HIGH TEMPERATURE PRESSURE SENSORS; SINGLE-CRYSTAL SILICON STRAIN GAGE;

DIAPHRAGMS; HIGH TEMPERATURE OPERATIONS; MEMS; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

PRESSURE SENSORS;

EID: 34547927000     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/MNC2007-21517     Document Type: Conference Paper

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