Visualization of the effect of liquid dispensing method during spin coating

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 8 A, 2007, Pages 5238-5244

  Huang, Kuo Hsin ^a   Chou, Fu Chu ^a   Yang, Cheng Pin ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Liquid reduction; Released drop; Spin coating; Spiral or centered injection

Indexed keywords

REYNOLDS NUMBER; SPIN COATING; VISUALIZATION;

CENTERED INJECTION; LIQUID REDUCTION; RELEASED DROP; SPIRAL INJECTION;

FLOW OF FLUIDS;

EID: 34547891529     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.5238     Document Type: Article

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