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Volumn 141, Issue 1, 2001, Pages 70-77
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Structure and properties of nanosized electron beam deposited zirconia thin films
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Author keywords
Excimer laser modification; Nanozised structure and properties; Oblique vacuum deposition; Zirconia thin films
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Indexed keywords
AMORPHOUS MATERIALS;
ANISOTROPY;
DEPOSITION;
ELECTRON GUNS;
ELECTRON OPTICS;
EVAPORATION;
MICROHARDNESS;
MORPHOLOGY;
NANOSTRUCTURED MATERIALS;
REFRACTIVE INDEX;
SURFACE STRUCTURE;
ZIRCONIA;
VAPOR INCIDENCE ANGLES;
THIN FILMS;
COATING;
DEPOSITION;
FILM;
LASER;
WEAR RESISTANCE;
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EID: 0035806007
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01162-8 Document Type: Article |
Times cited : (49)
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References (30)
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