Structures of anodized aluminum oxide extended-gate field-effect transistors on pH sensors

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 10 A, 2006, Pages 7999-8004

  Lin, Jyh Ling ^a   Chu, Yung Ming ^a   Hsaio, Shih Hua ^a   Chin, Yuan Lung ^a   Sun, Tai Ping ^b  

^a HUAFAN UNIVERSITY   (Taiwan)

^b NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

Acid base sensor; Aluminum oxide; Anodic oxidation; EGFET; SEM; XRD

Indexed keywords

ALUMINA; ANODES; ANODIC OXIDATION; PH SENSORS; READOUT SYSTEMS; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ACID-BASE SENSORS; EXTENDED-GATE FIELD-EFFECT TRANSISTOR (EGFET) SENSING FILMS; LINEAR SENSITIVITY;

FIELD EFFECT TRANSISTORS;

EID: 34547867787     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.7999     Document Type: Article

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