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Volumn 9, Issue 1, 1997, Pages 015-023
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Improving the drift and hysteresis of the Si3N4 pH response using RTP techniques
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Author keywords
Drift; Hysteresis; pH; Silicon nitride
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Indexed keywords
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EID: 0031519544
PISSN: 09144935
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (10)
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References (16)
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