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Volumn 45, Issue 10 A, 2006, Pages 7672-7674

Oxygen trap hypothesis in silicon oxide

Author keywords

Atom transport; Defects; First principles calculation; Oxidation; Oxygen; Si oxide

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; DEFECTS; DIFFUSION; OXYGEN; REACTION KINETICS; THERMOOXIDATION;

ATOM TRANSPORT; FIRST PRINCIPLES CALCULATION;

SILICA;

EID: 34547865392 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.45.7672 Document Type: Article

Times cited : (12)

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