Improvement in the flow rate of a miniature ultrasonic suction pump

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 7 B, 2007, Pages 4931-4935

  Hasegawa, Takeshi ^a   Koyama, Daisuke ^a   Nakamura, Kentaro ^a   Ueha, Sadayuki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Bending disk transducer; Bolt clamped Lange vin transducer; Flatness; Flow rate; Gap; Pump pressure; Ultrasonic pump; Valveless

Indexed keywords

PIPING SYSTEMS; PUMPS; ULTRASONIC DEVICES; VIBRATORS;

BENDING DISK TRANSDUCERS; BOLT-CLAMPED LANGE VIN TRANSDUCERS; PUMP PRESSURE; ULTRASONIC PUMPS; VALVELESS;

FLOW RATE;

EID: 34547855132     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.4931     Document Type: Article

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