Characteristics of surface-wave and volume-wave plasmas produced with internally mounted large-area planar microwave launcher

Applied Physics Letters

Volumn 87, Issue 16, 2005, Pages 1-3

  Nagatsu, Masaaki ^a   Naito, Katsutoshi ^a   Ogino, Akihisa ^a   Ninomiya, Keigo ^a   Nanko, Shohei ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b Nissin Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROWAVES; PROBABILITY; SURFACE WAVES;

ELECTRON ENERGY; MICROWAVE POWER; SURFACE-WAVE PLASMAS;

PLASMAS;

EID: 28344440206     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2108119     Document Type: Article

References (16)

1. K. Komachi and S. Kobayashi, J. Microwave Power Electromagn. Energy 25, 236 (1990).
2. G. Sauve, M. Moisan, and Z. Zakrzewski, J. Microwave Power Electromagn. Energy 28, 123 (1993).
3. F. Werner, D. Korzec, and J. Engemann, Plasma Sources Sci. Technol. 3, 473 (1994).
4. E. Bluem, S. Bechu, C. Boisse-Laporte, P. Leprince, and J. Marec, J. Phys. D 28, 1529 (1995).
5. M. Nagatsu, G. Xu, M. Yamage, M. Kanoh, and H. Sugai, Jpn. J. Appl. Phys., Part 2 35, L341 (1996).
6. M. Nagatsu, G. Xu, I. Ghanashev, M. Kanoh, and H. Sugai, Plasma Sources Sci. Technol. 6, 427 (1997).
7. M. Nagatsu, I. Ghanashev, and H. Sugai, Plasma Sources Sci. Technol. 7, 230 (1998).
8. H. Sugai, I. Ghanashev, and M. Nagatsu, Plasma Sources Sci. Technol. 7, 192 (1998).
9. M. Nagatsu, A. Ito, N. Toyoda, and H. Sugai, Jpn. J. Appl. Phys., Part 2 38, L679 (1999).
10. I. Odrobina, J. Kudela, and M. Kando, Plasma Sources Sci. Technol. 7, 238 (1998).
11. I. Ghanashev, M. Nagatsu, and H. Sugai, Jpn. J. Appl. Phys., Part 1 36, 337 (1997).
12. A. Ogino, K. Naito, F. Terashita, S. Nanko, and M. Nagatsu, Jpn. J. Appl. Phys., Part 2 44, L352 (2005).
13. M. Nagatsu, K. Naito, A. Ogino, and S. Nanko, Plasma Sources Sci. Technol. (submitted).
14. U. Kortshagen and H. Schlüter, J. Phys. D 24, 1585 (1991).
15. U. Kortshagen, Microwave Discharges: Fundamentals and Applications, edited by, C. M. Ferreira, and, M. Moisan, (Plenum, New York, 1993), p. 303.
16. M. Nagatsu, T. Niwa, and H. Sugai, Appl. Phys. Lett. 81, 1966 (2002).