Facing target sputtered iron-silicide thin film

Thin Solid Films

Volumn 515, Issue 22, 2007, Pages 8205-8209

  Nakamura, Shigeyuki ^a   Aoki, Takahiro ^a   Kittaka, Toshiaki ^b   Hakamata, Ryohei ^b   Tabuchi, Hidekazu ^b   Kunitsugu, Shinsuke ^c   Takarabe, Ken'ichi ^b  

^a TSUYAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b OKAYAMA UNIVERSITY OF SCIENCE   (Japan)

^c INDUSTRIAL TECHNOLOGY CENTER OF OKAYAMA PREFECTURE   (Japan)

Author keywords

Coating application; Facing target sputtering; Nano crystalline iron silicide; Solar cell

Indexed keywords

CHEMICAL BONDS; IRON COMPOUNDS; NANOCRYSTALLINE MATERIALS; OPTICAL PROPERTIES; SILICIDES; SOLAR CELLS; SPUTTERING;

FACING TARGET SPUTTERING; NANOCRYSTALLINE IRON SILICIDES;

THIN FILMS;

EID: 34547820718     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.02.038     Document Type: Article

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