Micromachined silicon x-ray optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2279, Issue , 1994, Pages 298-304

  Chen, Andrew W ^a   Kaaret, Philip E ^a   Kenny, Thomas W ^a  

^a Och Spine at New York Presbyterian Hospitals

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ETCHING; MICROMACHINING; OPTICS; SILICON WAFERS;

ANISOTROPIC ETCHING; SURFACE ROUGHNESS; X RAY OPTICS;

LENSES;

EID: 0028753821     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)