Processing and characterization of LiNbO3 thin film for metal ferroelectric semiconductor field effect transistor (MFSFET) application

Integrated Ferroelectrics

Volumn 40, Issue 1-5, 2001, Pages 171-180

  Wang, Xuguang ^a   Zhu, Jie ^a   Zhang, Hongzhou ^a   Lee, Tai Chou ^a   Vo, Trinh ^a   Rabson, Thomas A ^a   Robert, Marc A ^a  

^a Rice University   (United States)

Author keywords

C V; LiNbO3; MFSFET; P V

Indexed keywords

CHARACTERIZATION; FIELD EFFECT TRANSISTORS; LITHIUM COMPOUNDS; PROCESSING;

METAL FERROELECTRIC SEMICONDUCTOR FIELD EFFECT TRANSISTOR (MFSFET) APPLICATION; METAL ORGANIC DECOMPOSITION (MOD);

THIN FILMS;

EID: 34547752936     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580108010840     Document Type: Article

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