X-ray investigation of annealed CeO2 films prepared by sputtering on Si substrates

Thin Solid Films

Volumn 515, Issue 20-21, 2007, Pages 8078-8081

  Iordanova, I ^a   Popova, L ^b   Aleksandrova, P ^b   Beshkov, G ^b   Vlahkov, E ^b   Mirchev, R ^a   Blagoev, B ^b  

^a UNIVERSITY OF SOFIA   (Bulgaria)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

CeO2 Si system; RTA; X ray investigations

Indexed keywords

CERIUM COMPOUNDS; MAGNETRON SPUTTERING; RAPID THERMAL ANNEALING; SILICON; THERMAL EFFECTS; X RAY ANALYSIS;

AMORPHOUS PHASES; POLYCRYSTALLINE PHASES;

OXIDE FILMS;

EID: 34547689421     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.04.021     Document Type: Article

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