Fabrication of needle-like nanostructures using block copolymer for non-volatile memory

Materials Science and Engineering C

Volumn 27, Issue 5-8 SPEC. ISS., 2007, Pages 1452-1455

  Jung, Sungwook ^a   Kim, Kyunghae ^a   Park, Dae Ho ^b   Sohn, Byeong Hyeok ^c   Jung, Jin Chul ^b   Zin, Wang Cheol ^b   Hwang, Sunghyun ^a   Dhungel, S K ^a   Yoo, Jinsu ^a   Yi, J ^a  

^a Sungkyunkwan University   (South Korea)

^b Pohang University of Science and Technology (POSTECH)   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

Block co polymer; Nano Floating Gate Memory (NFGM); Nanomask; Nanostructure; RIE

Indexed keywords

BLOCK COPOLYMERS; NONVOLATILE STORAGE; OPTICAL RESOLVING POWER; PHOTOLITHOGRAPHY; POLYMETHYL METHACRYLATES; SELF ASSEMBLED MONOLAYERS;

NANO FLOATING GATE MEMORY (NFGM); NANOMASKS; PHOTOLITHOGRAPHIC RESOLUTION;

NANOSTRUCTURED MATERIALS;

EID: 34547683659     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2006.07.033     Document Type: Article

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