A silicon straight tube fluid density sensor

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1657-1663

  Najmzadeh, M ^a   Haasl, S ^b   Enoksson, P ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Imego AB The Institute of Micro and Nanotechnology   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CURVE FITTING; DENSITY (SPECIFIC GRAVITY); ETCHING; FUSION REACTIONS; RESONANCE; SILICON;

FLUID DENSITY SENSITIVITY; FLUID DENSITY SENSORS; HEXAGONAL CROSS SECTION; SILICON STRAIGHT TUBES;

MICROFLUIDICS;

EID: 34547683510     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/032     Document Type: Article

References (15)

1. Enoksson P, Stemme G and Stemme E 1996 Silicon tube structures for a fluid density sensor Sensors Actuators A 54 558-62
2. Sparks D, Smith R, Straayer M, Cripe J, Schneider R, Chimbayo A, Ansari S and Najafi N 2003 Measurement of density and chemical concentration using a microfluidic chip Lab Chip 3 19
3. Westberg D, Paul O, Andersson G I and Baltes H 1997 A CMOS-compatible device for fluid density measurements Micro Electro Mechanical Systems, MEMS '97: Proc., IEEE, 10th Ann. Int. Workshop (26-30 Jan. 1997) pp 278-83
4. Sparks D, Cruz V and Najafi N 2007 The resonant behavior of silicon tubes under two-phase microfluidic conditions with both microbeads and gas bubbles Sensors Actuators A 135 827-32
5. Schomburg W K, Vitt M, Bacher W, Borner M W and Menz W 1995 Measurements of physical parameters with ultrasound and microdiaphragms Micro Electro Mechanical Systems, MEMS '95: Proc., IEEE (29 Jan.-2 Feb. 1995) pp 139-44
6. Shih W Y, Li X, Gu H, Shih W H and Aksay I A 2001 Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers J. Appl. Phys. 89 1497
7. Harrison C, Ryu S, Goodwin A, Hsu K, Donzier E, Marty F and Mercier B 2006 A MEMS sensor for the measurement of density-viscosity for oilfield applications Proc. SPIE Int. Soc. Opt. Eng. 6111 61110D
8. Martin B A, Wenzel S W and White R M 1989 Viscosity and density sensing with ultrasonic plate waves Sensors Actuators A 22 704-8
9. Zhang J, Dai C, Su X and O'Shea S J 2002 Determination of liquid density with a low frequency mechanical sensor based on quartz tuning fork Sensors Actuators B 84 123-8
10. Grimes C A, Kouzoudis D and Mungle C 2000 Simultaneous measurement of liquid density and viscosity using remote query magnetoelastic sensors Rev. Sci. Instrum. 71 3822
11. Blevins R D 1979 Formulas for Natural Frequency and Mode Shape (New York: Van Nostrand Reinhold Company)
12. Lide D R 1999 CRC Handbook of Chemistry and Physics 80th edn (Boca Raton, FL: CRC Press)
13. Lide D R and Kehiaian H V 1994 CRC Handbook of Thermophysical and Thermochemical Data (Boca Raton, FL: CRC Press)
14. Sparks D, Trevino J, Massoud-Ansari S and Najafi N 2006 An all-glass chip-scale MEMS package with variable cavity pressure J. Micromech. Microeng. 16 2488-91
15. Cheesewright R and Clark C 1998 The effect of flow pulsations on Coriolis mass flow meters J. Fluids Struct. 12 1025-40