The resonant behavior of silicon tubes under two-phase microfluidic conditions with both microbeads and gas bubbles

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 827-832

  Sparks, D ^a   Cruz, V ^a   Najafi, N ^a  

^a Integrated Sensing Systems Inc   (United States)

Author keywords

Coriolis; Damping; Flow sensor; MEMS; Q; Resonantor; Two phase

Indexed keywords

BUBBLES (IN FLUIDS); DAMPING; MAGNETIC FIELD EFFECTS; MICROFLUIDICS; NATURAL FREQUENCIES; PARTICLES (PARTICULATE MATTER); RESONATORS; SILICON; TWO PHASE FLOW; VISCOSITY MEASUREMENT;

FLOW SENSORS; GAS BUBBLES; MICROBEADS; MICROTUBES;

TUBES (COMPONENTS);

EID: 34047144602     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.08.013     Document Type: Article

References (20)

1. Enoksson P., Stemme G., and Stemme E. Fluid density sensor based on resonance vibration. Sens. Actuators A 46 (1995) 327-331
2. Enoksson P., Stemme G., and Stemme E. A silicon resonant sensor structure for Coriolis mass-flow measurements. J. MEMS 6 (1997) 119-125
3. S. Tadigadapa, C. Tsai, Y. Zhang, N. Najafi, Micromachined fluidic apparatus, US Patent No. 6,477,901, 2002.
4. Sparks D., Smith R., Schneider R., Cripe J., Massoud-Ansari S., Chimbayo A., and Najafi N. A variable temperature resonant density sensor made using an improved chip-level vacuum package. Sens. Actuators A 107 (2003) 119-124
5. D. Sparks, R. Smith, S. Massoud-Ansari, N. Najafi, Coriolis mass flow, density and temperature sensing with a single vacuum sealed MEMS chip, Solid-State Sensors and Actuator, and Microsystem Workshop, Hilton Head, SC, June 2004, pp. 75-78.
6. J. Kohnle, G. Waibel, R. Cernosa, M. Storz, H. Ernst, H. Sandmaier, T. Strobelt, R. Zengerle, A unique solution for preventing clogging of flow channels by gas bubbles, MEMS 2002, IEEE, Las Vegas, NV, January 2002, pp. 77-80.
7. Jensen M., Goranovic G., and Bruus H. The clogging pressure of bubbles in hydrophilic microchannel contractions. J. Micromech. Microeng. 14 (2004) 876-883
8. Skea A., and Hall A. Effects of gas leaks in oil flow on single-phase flowmeters. Flow Meas. Instrum. 10 (1999) 146-150
9. Liu R., Fuent M., Henry M., and Duta M. A neural network to correct mass flow errors caused by two-phase flow in a digital Coriolis mass flowmeter. Flow Meas. Instrum. 12 (2001) 53-63
10. J. Grumski, R. Bajura, Performance of a Coriolis-type mass flowmeter in the measurement of two-phase (air-liquid) mixtures, Mass Flow Measurements ASME Winter Annual Meeting, New Orleans, LA, 1984.
11. Sparks D., Massoud-Ansari S., and Najafi N. Chip-level vacuum packaging of micromachines using nanogetters. IEEE Trans. Adv. Packaging 26 (2003) 277-282
12. Buser R., and De Rooij N. Very high Q-factor resonators in monocrystalline silicon. Sens. Actuators A21-A23 (1990) 323-327
13. A. Duwel, M. Weinstein, J. Gorman, J. Borenstein, P. Ward, Quality factors of MEMS gyros and the role of thermoeleastic damping, MEMS 2002, IEEE, Las Vegas, NV, January 2002, pp. 214-219.
14. Molday R. Application of magnetic microspheres in labeling and separation of cells. Nature 268 (1977) 438-441
15. Senyei A., Widder K., and Czerlinski G. Magnetic guidance of drug-carrying microspheres. J. Appl. Phys. 49 (1978) 3578-3582
16. J. Choi, An integrated microfluidic biochemical detection system with magnetic bead-based sampling and analysis capabilities, MEMS 2001, IEEE, 2001, pp. 447-450.
17. Taylor M., Belgrader P., Furman B., Pourahmadi F., Kovacs G., and Northrup M. Lysing bacterial spores by sonication through a flexible interface in a microfluidic system. Anal. Chem. 73 (2001) 492-496
18. D. Sparks, Micromachined lysing device and method of performing cell lysis, US Patent No. 6,92,169, 2005.
19. P. Lacey, S. Howell, Fuel lubricity reviewed, SAE 982567, October 1998.
20. D. Sparks, N. Najafi, Device and method for sensing rheological properties of a fluid, US Patent Pending, Ser. No. 60/588,669, 2005.